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Thin Film Characterization - Electrical and Magnetic Techniques
Ohring Chapter 10 Section 10.1.2 (resistance)
resistivity = fundamental property of a materialresistance = resisitvity combined with geometry
Four point probe:
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eliminates resistance of wires
still have contact resistance
need to know spacing of inner probes to convert to resistivity
careful not to puncture film with probes
Van der Pauw method:
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placement of measurement points is arbitrary
more mathematical analysis
need two measurements with contacts alternated
Magnetic properties of thin films can often be described by a hysteresis curve:
Magneto-optical Kerr effect (MOKE)
ellipsometry + a magnetic field on the samplemagnetic materials cause an additional rotation of the polarization of reflected light.
typically null out the normal ellipsometry effect and measure the change in intensity of reflected light as the magnetic field changes.
sensitive to thin films
© Thomas M. Christensen