PES 449 / PHYS 549        Spring 2000 Physics of Thin Films

Professor/office hours	course syllabus	textbook and reserve books
grading standards	Lecture notes	other thin film links

Physics of Thin Films:

• Introduction and overview (1/19)
• Basic Physics, Chemistry and Materials Science
  • Solid State Physics
    • Ideal solids and crystal structure (1/24)
    • Defects in solids (1/24 - 1/26)
    • Bonds and Electrons (1/26)
  • Thermodynamics and Phase Diagrams (1/26 - 1/31)
  • Kinetics and Diffusion (2/2)
  • Nucleation and Growth (2/7)
• Film Formation
  • Introduction, Trapping, Capillarity (2/9 - 2/14)
  • Growth modes and Zone models (2/16 - 2/21)
• Plasmas (2/21 - 2/23)

Film Deposition:

• Vacuum and Kinetic Theory of Gasses (2/28 - 3/1)
• Evaporation (3/6)
• Sputter Deposition
  • General process (3/8)
  • Specific methods (3/13)
• Cathodic Arc Deposition (skip)
• Molecular Beam Epitaxy (3/22)
• Chemical Vapor Deposition
  • general description (3/22, 4/3)
  • modifications (4/3)

Film Characterization:

• Overview (4/5, 4/17)
• Imaging Techniques (4/17-4/19)
• Structural Techniques (4/10, 4/24)
• Chemical Techniques (4/26, 5/1)
• Optical Techniques (5/1)
• Electrical / Magnetic Techniques (5/3)
• Mechanical Techniques (5/3)

Properties of Thin Films:

• optical properties
• electrical properties
• magnetic properties
• mechanical properties

all pages in this directory: ” Thomas M. Christensen